Mastering XRR Fitting|Home/Appendix A: Notation and Units

Appendices · Appendix A

Notation and Units

In This Chapter

  • The units used throughout the book
  • How angles are labeled
  • Every symbol, with the chapter that introduces it

This appendix collects the notation of the book. Each symbol links to the chapter that introduces it.

Units

The book uses the units of X-Ray Calc, so every number matches the screen.

  • Every length (thickness, roughness, period, wavelength) is in ångströms, Å. 10 Å = 1 nm.
  • Density is in g/cm³.
  • Angles are in degrees, and every angle is labeled θ or 2θ.
  • Photon energy is in eV. It appears only as an input that the program converts to λ.
  • Reflectivity has no unit. Measured intensity is in counts, or in counts/s for an .xrdml import.

Numbers use a decimal point. A range is written with an en-dash and no spaces: 0.012–0.015°. A number keeps the precision of its source.

θ and 2θ

θ is the grazing angle, measured from the surface. Every formula in the book uses θ. 2θ is the scattering angle. It is what the X-Ray Calc chart shows by default, with the 2θ box ticked. Every angle read off the chart, or typed into a range, a limit or a trim, is therefore 2θ. The conversion is θ = (2θ)/2.

The resolution Δθ is always a θ value, whatever the chart shows. On a 2θ axis the program doubles it.

Symbols

Beam and geometry

Table A-1: Beam and geometry.

SymbolMeaningUnitIntroduced in
θThe grazing angle of incidence, measured from the surface. Every formula uses θ.°Chapter 2
2θThe scattering angle. The chart shows it by default.°Chapter 2
λThe wavelength. On screen: λ(Å).ÅChapter 10
EThe photon energy, E = hc/λ, with hc = 12398.6 eV·Å.eVChapter 4
qThe wave-vector transfer in vacuum, q = 4π sin θ / λ.Å⁻¹Chapter 7
q₀, q′In the roughness factor: q in vacuum, and q refracted across the interface.Å⁻¹Chapter 7
kjThe wave vector across the layers in medium j.Å⁻¹Chapter 8
Fj, rjThe reflection of the interface under medium j, with its roughness factor; the reflection of everything from that interface down.noneChapter 8
ΔθThe angular resolution: the FWHM of the Gaussian blur of the calculated curve. Always a θ value.° (θ)Chapter 8
s, pThe two polarization states. On screen: Polarization.noneChapter 8

Optical constants

Table A-2: Optical constants.

SymbolMeaningUnitIntroduced in
nThe complex refractive index, n = 1 − δ + iβ.noneChapter 4
εThe dielectric constant, ε = 1 − 2δ + 2iβ.noneChapter 8
δThe refractive decrement, proportional to ρλ²f₁/A.noneChapter 4
βThe absorption index, proportional to ρλ²f₂/A.noneChapter 4
f₁, f₂The atomic scattering factors, real and imaginary, from the Henke tables.electronsChapter 4
AThe molar mass. On screen: A (g/mol).g/molChapter 4
reThe classical electron radius, 2.82 × 10⁻⁵ Å.ÅChapter 4
NAThe Avogadro constant, 6.02 × 10²³ mol⁻¹.mol⁻¹Chapter 4
θtThe angle of the transmitted beam inside a material, measured from the surface.°Chapter 4
θcThe critical angle, θ_c ≈ √(2δ) in radians.°Chapter 4

The structure

The structure terms are those of X-Ray Calc.

Table A-3: The structure.

SymbolMeaningUnitIntroduced in
MaterialThe chemical composition of a layer, such as Mo, SiO2 or B4C. It sets f₁, f₂ and A. It is never fitted.noneChapter 1
LayerOne material with three parameters: H, σ and ρ.noneChapter 1
StackA set of layers, single or repeated N times.noneChapter 1
StructureAll the stacks, the substrate included.noneChapter 1
SubstrateA stack of one layer of infinite thickness. It is held in a fit.noneChapter 12
HThe thickness of a layer.ÅChapter 1
σThe roughness of a layer’s upper interface. The substrate’s σ is the roughness of its surface.ÅChapter 7
ρThe density. ρ = 0 means the bulk density of the material’s table.g/cm³Chapter 4
DThe period of a periodic stack, the sum of the H of its layers. The D box shows the top period.ÅChapter 6
NThe number of periods of a stack.noneChapter 6
mThe Bragg order index, m = 1, 2, 3, …noneChapter 6
kThe period index in a periodic stack, counted from the surface: k = 1 is the top period.noneChapter 17
C₀, C₁, …The coefficients of a polynomial profile: value(k) = C₀ + C₁(k − 1) + C₂(k − 1)² + … C₀ is the value of the top period.as the parameterChapter 17
ΔDThe period drift: the bottom period minus the top one, ΔD = D(N) − D(1).ÅChapter 17
θmThe angle of the m-th Bragg order.° (θ)Chapter 6
δ̄The refractive decrement averaged over one period, as it enters the Bragg law with refraction.noneChapter 6
DmThe period that the plain Bragg law gives from order m alone, D_m = mλ/(2 sin θ_m).ÅChapter 6
ΓThe layer ratio: the thickness of the heavy layer of a two-layer period divided by D.noneChapter 6

The measured curve and the fit

Table A-4: The measured curve and the fit.

SymbolMeaningUnitIntroduced in
RThe reflectivity, as calculated.noneChapter 1
IThe measured intensity.countsChapter 10
θmax, ImaxThe angle and the intensity of the measured maximum below the critical edge, the plateau maximum.°, countsChapter 11
backgroundThe median intensity past the last visible order, never less than one count.countsChapter 11
rminThe floor: calculated values below it are raised to it, in the curve and in χ². On screen: R min.noneChapter 14
one countOne detector count on the curve that an .xrdml import scales to 1: 1 / (peak rate × counting time).noneChapter 10
λ from the fileFor copper with both Kα lines, (Kα1 + r·Kα2)/(1 + r) = 1.541874 Å at r = 0.5; behind a monochromator or hybrid mirror, Kα1 = 1.540598 Å.ÅChapter 10
scaleThe factor that puts the measured curve on the reflectivity axis.noneChapter 14
wThe window of the solved scale: the scale may move by a factor of up to 1 + w from its anchor. On screen: Window.noneChapter 14
χ²The cost function as displayed: the weighted mean squared relative residual of log I, times 1000.noneChapter 9
plain χ²The same sum with both weights set to 1. It is shown, and never minimized.noneChapter 9
PW χ²The peak weighting of χ².noneChapter 9
TW χ²The angle weighting of χ²: none, θ², θ, √θ, 1/θ² or 1/√θ of the chart axis.noneChapter 9
Min, MaxThe fit limits of one parameter. The parameter is fitted only when Min ≠ Max.as the parameterChapter 15
ΔH, Δσ, ΔρThe fractions that Initialize uses: Min = V(1 − Δ), Max = V(1 + Δ).noneChapter 15
pThe polynomial order in Polynomial mode. On screen: Order.noneChapter 17
populationThe number of particles in the swarm.noneChapter 16
iterationsThe largest number of iterations of a fit.noneChapter 16
seed spreadThe sample standard deviation of a fitted parameter over repeated runs.as the parameterChapter 16
seedThe start value of the random numbers of one fit.noneChapter 9
SeedRStart the swarm spread over each parameter’s whole Min–Max range.noneChapter 9
Vmax, KsxrThe largest step, and the scatter around a structure, as fractions of each parameter’s range.noneChapter 9
Jmax, SHmax, k1, k2The Shake settings: iterations without improvement before a shake; shakes before a return to the best; the lift of the best χ²; the enlargement of Vmax and Ksxr.noneChapter 9
ToleranceThe fit stops when the best χ² falls below it.noneChapter 9
x, v, b, g, u₁, u₂, c₁, c₂, κThe particle-swarm step: position, step, best particle of the iteration, best structure so far, random numbers in [0, 1], the two pulls, the constriction factor.noneChapter 9

The Bragg law with refraction

Every period in the book is read from the orders with this law (Chapter 6: The Bragg law with refraction):

sin⁡2θm=(mλ2D)2+2δˉ\sin^2\theta_m = \left(\frac{m\lambda}{2D}\right)^2 + 2\bar{\delta}

Labels that can mislead

  • N means two things on the screen. In the structure panel it is the number of periods. In the calculation settings it is the number of calculated points. The book writes N only for periods.
  • Some labels are drawn in the Symbol font. The screen shows θ, Δθ, 2θ, λ(Å), θ1 and θ2. The book quotes the labels as they appear.
  • The molar mass in Tools > Edit Henke table… reads A (g/mol) from 3.9.4, and N (a.u.) in earlier versions. It is neither a number of periods nor a number of points.

Abbreviations

Table A-5: Abbreviations.

AbbreviationMeaningFirst use
XRRX-ray reflectivityChapter 1
PMMPeriodic multilayer mirrorChapter 6
LFPSOLévy-flight particle swarm optimization, the fitting algorithm of X-Ray CalcChapter 9
FWHMFull width at half maximumChapter 8
GUIGraphical user interfaceChapter 2

Sources

  • NOTATION.md of this book, §1–3 and §5–7: the units, the angle convention, the symbols and their sources, the on-screen labels and the abbreviations. Each symbol’s own source (the X-Ray Calc Help, the X-Ray Calc source, the fitting procedure, Spiller) is named there and in the chapter linked.
  • X-Ray Calc Help: Models → Terminology (material, layer, stack, structure, substrate; from Penkov et al. 2024); Calculation → Algorithm; Fitting → Understanding the Cost Function.
  • The X-Ray Calc 3 source: hc = 12398.6 eV·Å (Shared\Math\math_globals.pas); the resolution doubled on a 2θ axis (Shared\Math\unit_calc.pas); the period index counted from the surface.

Cross-references: Chapter 2: 2θ or θ; Chapter 4: Where δ and β come from; Chapter 6: The Bragg law with refraction; Appendix D: Glossary.

Open the image file